Rigorous simulation is essential for advanced lithography, both DUV and EUV. Fastlitho offers the fastest and most accurate rigorous simulation software in the industry.
There is no need to trade accuracy for speed: You can now have both.
We can customize our software for integration into your in-house process flow.
We also offer lithography-simulation related consulting service.
Our rigorous simulator can be run from a GUI or called from any scripting language of your choice.
Our rigorous simulator can be used for mask-inspection and scatterometry simulation too.
If you have a lithography-simulation project but do not wish to do the simulation yourself, we can do it for you.
If you have any question, get in touch by email or phone.